Nanostructured back surface amorphization of silicon with picosecond laser pulses
نویسندگان
چکیده
Laser-based amorphization on the back surface of a 525- μm thick crystalline silicon sample is studied. To deposit sufficient energy for local change from to an amorphous state, laser irradiation at 2- wavelength with 25-ps pulse duration combined Bessel beam shaping. Deterministic single-site modifications and homogeneous continuous lines are demonstrated. Optical electron microscopy together Raman spectroscopy measurements highlight material transformations featuring formation subwavelength periodic structures. The investigations open up possibilities processing in-built microelectronic devices.
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2022
ISSN: ['1520-8842', '0003-6951', '1077-3118']
DOI: https://doi.org/10.1063/5.0103276